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Metrology and Inspection Forum

Room 402, COEX Thursday, January 24
10:00am to 7:00pm

New Waves: Ready to Enjoy?
 
The new waves of industry 4.0 is coming and the role of metrology and inspection is getting more and more important to enable it. To enjoy these waves, we need to prepare the new technologies and sources accordingly in a timely manner. With excellent 10 presentations from technology experts, you can get better understanding on MI challenges and solutions we’re facing now and near future and build the strong network with industry leaders.
 
  • Date: Jan 24(Thu), 2019
  • Time: 10:00-19:00
  • Room: #402, Conference Room (South), COEX
  • Language: English and Korean (Simultaneous interpretation will NOT be provided)

 

Committee

  • Chuck Kim (AMETEK Korea)
  • Chang Woo Kim (KLA Corporation)
  • TK Kim (Semilab Korea)
  • Harris Kim (Rudolph Technologies Korea)
  • Munhong Ro (DB HiTek)
  • Changman Moon (NOVA Measuring Instruments Korea)
  • Byong Chon Park (KRISS)
  • Hyungwon Yoo (Hitachi High-Technologies Korea)
  • Byoung-Ho Lee (SK hynix)
  • Suk Woo Martin Lee (Applied Materials Korea)   
  • Sung Hun Lee (Thermo Fisher Scientific Electron Microscopy Korea)
  • Dongchul Ihm (Samsung Electronics)
  • Hyunjin Chang (Auros Technology)
  • Jason Jeong (Nextin)
  • Jaesung Choi (ASML Korea)

 

Registration Fee

  SEMI Member Non-Member Student
Early Bird (by Jan 16) 200,000 won 240,000 won 120,000 won
Onsite 240,000 won 280,000 won 150,000 won

 

Agenda

 
 
10:00-10:10
Welcome
 
 
10:10-10:40
Keynote
 
 
 
 
 
 
Session 1: Industry 4.0
 
 
10:40-11:10
A Systematic Approach to Integrate Metrology and Inspection
 
 
 
11:10-11:40
Industry Overview of Fast and Intelligent Metrology by S/TEM (CD-TEM)
 
 
 
11:40-12:10
 
 
 
12:10-14:00
Lunch
 
 
14:00-14:30
 
 
 
14:30-15:00
 
 
 
15:00-15:20
Break
 
 
 
 
Session 2: New Sources
 
 
15:20-15:50
E-beam Metrology in Semiconductor Development
 
OhJang Kwon, SK hynix
 
 
15:50-16:20
 
 
 
16:20-16:40
Break
 
 
16:40-17:10
 
 
 
17:10-17:40
 
 
 
17:40-18:10
 
 
 
18:10-19:00
Networking Reception
 
(Forum attendees are invited to networking reception.)
 
 
*The agenda will be subject to change without notice.

 

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