Plasma & Etching Tutorial

Room 307, COEX Thursday, January 24
9:00am to 12:00pm

This short course tutorial is designed as basic course for new engineers who is working at etching technology related area. With the practical lecture from device makers, equipment suppliers and academia, you will learn the hottest issues and challenges in plasma & etching process and fundamental technologies as well.


  • Date: Jan 24(Thu), 2019
  • Time: 09:00-12:00
  • Room: #307, Conference Room (South), COEX
  • Language



  09:45-10:00 Break
 10:45-11:00 Break
Research Trend of Atomic Layer Etching
*The agenda will be subject to change without notice.
*Proceeding will be provided at onsite.
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