Plasma & Etching Tutorial

Room 307, COEX Thursday, February 01
9:00am to 11:45am

This short course tutorial is designed as basic course for new engineers who is working at etching technology related area. With the practical lecture from device makers, equipment suppliers and academia, you will learn the hottest issues and challenges in plasma & etching process and fundamental technologies as well.


  • Date: Feb 1(Thu), 2018
  • Time: 09:00-11:45
  • Room: #307, Conference Room (South), COEX
  • Language: Korean (Simultaneous interpretation will NOT be provided)



Registration Fee

  SEMI Member Non-Member Student
Early Bird (by Jan 24) 100,000 won 120,000 won 50,000 won
Discounted with S4 80,000 won 100,000 won 30,000 won
Onsite 120,000 won 150,000 won 80,000 won
Discounted with S4 100,000 won 120,000 won 50,000 won



      09:45-10:00 Break
     10:45-11:00 Break
    Research Trend of Atomic Layer Etching
    *The agenda will be subject to change without notice.
    *Proceeding will be provided at onsite.
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