Beyond Full Automation
With the full automation of standard manufacturing scenarios, the focus in leading edge semiconductor manufacturing has moved to fab performance optimization, to reducing the remaining manual exception handling tasks for the manufacturing workforce and to prioritization of such tasks.
The key challenges to this endeavor are the identification of the most problematic exception cases, the implementation of fully or partially automated solutions for these and in developing prioritization methods for operators to address the most critical manual efforts in the right order.
Due to the ever-growing number of data sources as well as the sheer amount of data that is available for such analysis in a modern factory, new ways of addressing the analysis challenges are required. In addition, new process requirements drive increasingly complex dynamic run-path decisions and constraints. Such process complexity driven restrictions are detrimental to the ideal manufacturing flow. On the other hand, elimination of all of these constraints – while potentially possible – requires significant effort. It is therefore of increasing importance to better understand the effect of these constraints on manufacturing performance to be able to focus on those constraints benefits of resolving these largely outweighs the corresponding effort.
In our presentation we will present several case studies addressing both the data analytics as well as the task prioritization methods GLOBALFOUNDRIES has developed to overcome these challenges.