Emerging of Memory and Logic Process Technology: Epitaxy
Epitaxy has been key technology to drive current boosting in logic process technology. Embedded source and drain epitaxy still plays a big role in sub 10 nm node in logic device. In memory device, 3D NAND already adopted epitaxy technology, and DRAM is following the same trend. Moreover, due to its selective characteristics, epitaxy technology is expected to be key enabler to overcome the challenge of scaling down in memory device. This talk will present several prototype works of epitaxy application in DRAM device, and project the opportunities of epitaxy in DRAM and 3D NAND application.