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EUVL Optics: Status and Future Perspectives

EUVL Optics: Status and Future Perspectives

EUVL Optics: Status and Future Perspectives

 

Today the next big technology step in Optical Lithography is happening: the introduction of EUV Lithography into HVM production to support the continuation of Moore’s Law. After a long development period the optics for EUVL has reached a high performance level.
With High NA EUV the next technology generation of Optical Lithography is already becoming visible.

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