MRAM HVM Metrology Challenge and Innovative MR Solution
STT MRAM is a very promising candidate for next generation memory device. It is non-volatile, high endurance/reliability, and high scalability, which is ideal for mobile applications.
However, STT MRAM manufacturability is still facing huge challenges, esp. in film deposition, patterning and etching. Metrologies for process monitoring are critical to solve these process issues.
KT’s MR6000 product offers key solution for STT MRAM process monitor. Unique values of MR6000 are presented in the presentation.