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Readiness of EUV Blanks

Readiness of EUV Blanks

Readiness of EUV Blanks

 

In this presentation, development status and readiness of EUV blanks at HOYA corporation will be described. EUV blanks need to achieve tighter defect criteria than optical blanks that supports current conventional lithography. Due to efforts over many years, HOYA has successfully reduced defect level that meets criteria from industry. The readiness of other important factors will be described as well.

 

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