Rudy Peeters, Ph.D., has been EUV product manager at ASML since 2005 starting with responsibility for the NXE:3100, and later for the NXE:3300B EUV systems. Now he is responsible for the pellicle product.
Prior to working as product manager, Dr.Peeters was engineer at ASML. In this position he worked on the PAS/800 and the first TWINSCAN systems including immersion.
Before working at ASML, Dr.Peeters received his physics degree at the Radboud University in Nijmegen (The Netherlands). He specialized in applied physics with the focus on combining laser technologies with the need for environmental measurements.
본 연사의 발표는 S1. Advanced Lithography(STS) 에서 볼 수 있습니다.