Junghyung Lee has been a senior engineer at SK hynix since 2007 with responsibility of process and materials development for advanced lithography. His current research interests include EUV lithography and ArF immersion multiple patterning technologies.
Lee received his B.S. degree in electrical engineering from Inha university, Incheon, Korea
본 연사의 발표는 S1. Advanced Lithography(STS) 에서 볼 수 있습니다.