[Session 2 : SEMI S6] Ensuring the Safe Use of Flammable Gases in The Semiconductor Industry
The safe handling of flammable chemistries is a critical safety concern in the semiconductor industry. The SEMI S6 test protocol was developed to ensure flammable gases would not be an explosion or fire hazard even under fault conditions. This presentation will explore this methodology in detail. It will explain the S6 approach and explain how it has been used to effectively protect against these hazards in the semiconductor industry. An alternative approach has been used recently in using the calculation method of IEC 60079-10-1 and that method will also be explored. Finally, the two methods SEMI S6 and IEC 60079-10-1 will be compared. This will be done by explaining the results of SEMI S6 in terms of IEC 60079-10-1. This comparison will permit conclusions to be drawn about how to most effectively ensure flammable gases are handled safely in the semiconductor industry.