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[Session 1: Alternative MI] E-Beam Metrology, Inspection and Deep Learning

오후 12:00 - 오후 12:30

The deep learning revolution this decade owes much of its success to the advances in convolutional neural networks (CNNs), enabling applications including computer vision and image analysis. Such techniques benefit from a large amount of well-structured data (often image data), which make them a perfect fit for SEM-related applications.

For several years, the vast amount of data provided by high-throughput SEMs (such as the eP5 from HMI) and improved contour extraction algorithms have enabled deep learning applications in OPC modeling, replacing part of the OPC model with CNNs. More recently, similar applications have been extended to the modeling of stochastic effects which are of particular interest in EUV lithography, including prediction of stochastic edge placement errors (EPEs), and prediction of contact hole failure rate from optical images (simulated) or resist images (measured).

In addition, benefits of deep learning are demonstrated for inspection applications, improving the accuracy or throughput, by enhancing the quality of SEM images. Additional use cases include simulation of SEM images from design layout, automatic defect classification, and pattern identification.

We will discuss the current synergies between e-beam metrology, inspection, and deep learning, and provide an outlook to the future.

Speaker

Yu Cao

Yu Cao

CEO, HMI, an ASML company

Yu Cao is Senior Vice President at ASML, and CEO of HMI, an ASML company.
Dr. Cao started his career as an algorithm engineer at KLA-Tencor from 1996 to 2000, where his contributions to the 300 and 500 series reticle inspection systems were recognized with three consecutive promotions. He joined Onetta in 2000, a venture-backed optical communications company, as software development manager. Dr. Cao co-founded Brion in 2002, and architected the development of lithography modeling and simulation algorithms, a key enabler of Brion products. After the acquisition of Brion by ASML in 2007, Dr. Cao led the development of new product applications of computational lithography in the fab space. In 2011, he left ASML to co-found Founton Technologies, a company in the area of digital advertising, which was acquired by Alibaba in 2014. he led the Silicon Valley team of Alibaba’s Institute of Data Science and Technologies. Dr. Cao returned to ASML in 2015 and took the position of Brion General Manager, before moving to HMI in the beginning of 2020.
Cao received his M.S. and Ph.D. in Physics from the California Institute of Technology, Pasadena, California, USA, and a bachelor's degree from the University of Science and Technology of China, Hefei, Anhui, China. Yu holds over 40 US patents.