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[Session 3: Reliability] Providing Contamination Monitoring for Yield Enhancement in Semiconductor Process: From Chemical to Wafer

오후 5:20 - 오후 5:50

Even in current nanoscale semiconductor fabrications, chemical contaminations such as metal, ionic and organic are caused a serious production yield issue. Many effects have been made to control the chemical contamination level for yield enhancement. In-line motoring of chemical contamination will be discussed in detail.

Speaker

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Jung-Hwan Kim

Head of Research & Development, NvisANA

Dr. Jung-Hwan Kim is a head of research and Development of NvisANA(Contamination Monitoring Total Solution Provider) since 2019. He received his Ph.D. in Surface Chemistry from Seoul National University and performed post-doctoral researches at UVA and PSU. Before Joining NvisANA, Jung-Hwan worked at Samsung Electronics to discover new metrology techniques for yield enhancement in Semiconductor process and at Korea Basic Science Institute to develop surface analysis instrument base on mass spectrometry.