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[Session 3: Reliability] Quantitative Automated AFM Technologies and Reliability Improvement for Semi Applications

오후 4:50 - 오후 5:20

Atomic Force Microscope (AFM) is a powerful instrument in characterizing nanoscale features, but it lacks accuracy and repeatability in measuring absolute dimensions. The primary reasons for this matter are the poor behavior of the piezoelectric tube scanner and the inconsistent tip geometry caused by tip wear. Due to these reliability issues together with complex setting of operating parameters, AFM cannot be widely adopted compared to other microscopes such as optical microscope or scanning electron microscope (SEM).

However, the importance of AFM analysis is growing due to the strong necessity to investigate and characterize innovative nanomaterials. Finding new materials with innovative characteristics in nanoscale have helped guide many industries to grow and the newly found materials have contributed breakthroughs in sectors such as energy, transportation, and life science. Quantitatively characterizing electrical, magnetic, mechanical, and morphological properties of these materials are major concerns for both research and industrial sectors.

In addition, we have developed various and reliable semiconductor AFM solutions to complement existing optical metrologies in process development, production, and defect analysis. I would like to introduce the key AFM technologies that enables such developments and present some of the successful examples of semiconductor metrology.

Speaker

Sang-Joon Cho

Sang-Joon Cho

Vice President & Director, Park Systems

 

EDUCATION

Iowa State University Ph.D. in Neuroscience, 1998

 

PROFESSIONAL Position

Current, Park Systems Corp., S. Korea – Vice President & Director, R&D Application Tech Center

Current, Advanced Institute of Convergence Technology, Seoul National Univ., S. Korea, Principal Researcher

Current, ISO TC201 SC9 Scanning Probe Microscopy Chairman

Current, Korea Analytical and Scientific Instruments Association (KASIA) BOD Member

Dec 2003 – Sept 2005, KAIST - Research Professor, Jung Mun Sul Center

Oct 2000 – Aug 2003, Wayne State Univ. - Research Fellow, Dept. of Physiology,

NanoBioTechnology Center, Assoc. Director (02~03)

 

PROFESSIONAL ACTIVITIES (Recent yrs.)

Feb 2008 –ISO TC201 SC9 Secretary & Convener and Expert, Chairman since 2018

June 2018 - May 2020, PI, Nanoconvergence 2020 Grant Award ($ 2.5 Millions)

June 2015 - May 2018, PI, Nano Core Technology Development Grant Award ($ 5 Millions)

June 2013- May 2018, PI, Advanced Technology Center Grant Award ($ 3.5 Millions)

June 2013- May 2015, PI, Global Strong SME Grant Award ($ 1.2 Millions)

June 2009- May 2012, PI, National Core Technology Project Grant Award ($ 4 Millions)

June 2009- May 2012, PI, National Standardization Project Grant Award ($ 72,000)

 

PROFESSIONAL HONORS & AWARDS (Recent yrs.)

Nov 2017 – Achievement Award, Ministry of Science and ICT

Nov 2014 – Business Leadership Award, Gyeonggi Small & Medium Business Administration

May 2014 – Best Paper Award, Micro & Nano Eng. Div. Korean Society of Mechanical Engineers

Dec 2012- Included in the 30th Pearl Anniversary Edition of Who's Who in the World

Aug 2012- Innovative Research Award, Ministry of Education, Science and Technology

Aug 2012- Excellent in Industrial Technology Award, Ministry of Knowledge Economy to Park Systems

Dec 2010- Constituted Korea’s Top 10 Technologies in 2010 to Park Systems

Dec 2010- Silver Prize in 2010 Korea Technology Awards to Park Systems

 

Scientific Publications (44+)

Abstracts of Papers Presented at Scientific Meetings (60+ oral)

Abstracts of Papers Presented at Scientific Meetings (45+ Poster)

Invited Presentations & Lectures in General Subject (100+ Presentations)