Hakaru Mizoguchi

Hakaru Mizoguchi is Senior Fellow of Gigaphoton Inc., Guest Prof.of Kyushu University, and Fellow of The International Society of Optical Engineering (SPIE), and member of The Laser Society of Japan and The Japan Society of Applied Physics.

Since 1990 he concentrated on KrF,/ArF excimer laser and F2 laser research and development for lithography application. In 2000 Gigaphoton Inc. was founded. He was one of the founders of Gigaphoton Inc.. From 2002 to 2010 he organized EUV research group in EUVA program. He got Sakurai award from OITDA Japan in 2018 and IAAM Scientist Award in Advanced Materials Lecture Series 2020.