Seiji Nagahara

Seiji Nagahara, Ph.D. is Principal / Chief Scientist in Tokyo Electron Ltd (TEL). He now works for marketing and development of the next generation coater and developer equipment and technologies for future lithography in TEL.

Prior to joining TEL, he was a lithographer in Renesas Electronics, NEC Electronics, and NEC. He researched lithography related technologies in a variety of places including IMEC (Belgium), University of California, Berkeley (USA), Argonne National Laboratory (USA), EIDEC (Japan) and Toshiba (Japan) in addition to TEL.

He took Bachelor, Master, and Ph.D. degrees in Engineering at Osaka University, Japan. He is active as an author of technical papers, book chapters, and patents in patterning technologies. He also contributes to the academic and technical societies as a committee member.