Sungyong Park

Sungyong Park has been working for Samsung Electronics since 2009. Since joining the company, he has been working on the simulation of structure, vibration, dynamics, airflow, heat transfer, ultrasound and molecular dynamics for the semiconductor equipment and process, and now is developing semiconductor process equipment based on simulation technology. In particular, he developed the photo track equipment for ArF-i photo lithography process. Currently, he is in charge of group leader for the development of CMP and cleaning process equipment based on wet/gas/plasma physics. He earned Ph.D. degree in mechanical engineering from Seoul National University in 2009, and in particular, he conducted research on noise reduction scheme for the structural-acoustic-coupled systems, signal processing of vibration/noise signals such as time-frequency decomposition and system identification of dynamic systems.