Prof. Jin-Seong Park

“Jin-Seong Park”, Ph.D. has been a professor at Division of Material Science and Engineering, Hanyang University (Seoul), South Korea since 2013. Since he got Ph. D. from KAIST (2002) about developing direct plasma (CCP) ALD for metal nitride, he has explored various oxide semiconductors (IGZO etc.) and insulators (SiO2 & high-k dielectric) via ALD for Semiconductor/Display applications. Before he joined the faculty of Hanyang University in 2013, he was at Dankook University, Korea (2009-2013). He was a senior researcher of Samsung SDI (2005-2008) and Samsung Mobile Display (2008-2009) and worked as post-doctor at Roy Gordon’s Laboratory in Harvard, USA (2003-2005).

He is an author of more than 250 technical publications in international journals and filed more than 100 patents (Domestic and International Patents). He has also given invited lectures/presentations at numerous technical conferences as well as worked actively in international conferences and as Editors (IEED-TED, EML, JID). He served as the general chair for 18^th International AVS (American Vacuum Society)-ALD 2018, as well as a member for Korean Information Display Society, Korean Material Research Society, and American Vacuum Society. He has received the Merck Young Scientist Award (2014), President Award in KEIT (2017) and Merck Special Award (2021) for ALD Oxide Semiconductor Material and Process applications.