Chris Bailey

1999 – now: development of vacuum, abatement and related equipment for semiconductor processes.

1990 – 1999: Vacuum Pump development for semiconductor applications, Edwards

1987 – 1990: Optical Systems development, KeyMed

1985-1987: Diesel Fuel Injection development, Lucas CAV

1982 – 1985: Aircraft Instrumentation development, Negretti Aviation

Chris Bailey has been Vice President, Emerging Technologies at Edwards since 2017 with responsibility for developing technologies that increase the sustainability of semiconductor manufacturing processes. Examples include developing alternative vacuum and abatement system architectures that reduce energy consumption and footprint and also technologies for recovering and recycling process materials from the waste stream.

Chris Bailey joined Edwards in 1990 and has developed many vacuum pumps and abatement systems for the whole range of semiconductor process applications. Examples include Edwards EUV Zenith for the EUV Lithography application and Edwards Regis that extends the life of the vacuum system for a range of challenging vacuum processes.

Bailey received a Higher National Diploma from Hatfield Polytechnic, United Kingdom in 1982 and is the holder of several patents.