Nancy Heylen

Nancy Heylen, Ph.D. is an R&D team lead in the CMP group of the Unit Process and Module division at Imec in Belgium.

Dr. Heylen has been working at IMEC since March 1997 and within a timeframe of more than 25 years she has been involved in the process development of dielectric as well as metal CMP steps and post-CMP cleaning processes starting from the 0.35 mm down to the 2 nm technology node.

The last few years Dr. Heylen was, as a senior R&D engineer, mainly involved in the development of metal CMP process steps (Cu, Ta, Co, Mo, Ru, binary metal) for 3Di and nanointerconnect technology. She has started a new role as R&D team lead of the CMPPMEC team in 2023
Dr. Heylen received her Ph.D. degree in Chemistry at the University of Leuven, Belgium in September 1996.