Masayuki Kagawa
Lead Engineer/Architect, Canon
Mr. Masayuki Kagawa is a Lead Engineer of the NGL Development Center for Semiconductor Manufacturing Equipment of Canon.
He has been involved in the process and equipment development of nanoimprint lithography.
Prior to joining Canon Inc, he was Process Integrator at Toppan Printing co. ltd. working on ebeam lithography engineering and leading edge ArFi/EUV photomask development.
He received M.S. degree in the Department of Physics from Tokyo University of Science, Japan