Katrina Mikhaylichenko

Katrina Mikhaylichenko, Ph.D., joined Applied Materials in 2013. She is currently the Senior Director of Technology in the Chemical Mechanical Polishing Business Unit, responsible for technology development for Dielectric CMP and post-CMP Cleans. Dr. Mikhaylichenko’s team is focused on the defect reduction approaches in CMP through the development of new cleaning modules to address emerging trends, as well as through continuous performance improvement efforts. In addition, her team is focused on the new Titan Horizon polishing head development and advanced application development for dielectric CMP.

Prior to joining Applied Materials, Dr. Mikhaylichenko has been working for 15+ years at Lam Research Corp. There, she led technology development efforts in the areas of defect reduction, wet etch, and surface preparation in various wet processing divisions (brush scrubbing, CMP, general cleans). She played a leading role in the development of the Next Gen Spin wet clean system; she was the major contributor to development of Lam proprietary Confined Chemical Clean Technology.

Dr. Mikhaylichenko has a Master of Science degree in Chemical Engineering from the Moscow Mendeleev Institute of Chemical Technology and a Ph.D. degree in Physical Chemistry from the University of Southern California. She has been granted over 100 patents. She is passionate about enabling innovation and instigating positive change.