Marc Kea

Marc joined ASML-HMI in 2016, working with customers on metrology & inspection application & product development. In 2020, he took the Head of System Engineering & Technology position, responsible for e-beam inspection & metrology technology roadmap. In 2024, he became Head of Inspection & Metrology Program, responsible for executing the roadmap.   
Marc has been a part of ASML since 2008. Before moving to HMI, he was initially responsible for the introduction to customers of immersion lithography in Japan, Korea, China and Taiwan. Later, he joined ASML’s Application business line, introducing diffraction based overlay and scanner control algorithms in Korea, and in Austin, TX.  

Marc graduated in Applied Physics at TU Delft, The Netherlands. He later built hardware and algorithm prototype for beam alignment of the Large Hadron Collider. This system was implemented on muon chambers of ATLAS detector.