Prof. Steven M. George

Steven M. George is a Professor in the Department of Chemistry at the University of Colorado at Boulder. Dr. George is directing a research effort focusing on atomic layer deposition (ALD) and atomic layer etching (ALE).  This research is examining new thin film growth and etching chemistry, measuring thin film growth and etching with various in situ methods, and developing new applications for ALD and ALE.  Dr. George’s recent work has focused on novel mechanisms for thermal ALE and electron-enhanced ALD and ALE.  Dr. George has received a number of awards including the John A. Thornton Memorial Award from the AVS (2017) and the ALD Innovation Award from the AVS International Conference on ALD (2013).  He is also a co-founder of ALD NanoSolutions, a company that worked to commercialize ALD technology. ALD NanoSolutions merged with Forge Nano (2020).