Changwan Lee
Process engineer / Senior process engineer II, ASM
2018.8-present, ASM Korea, Process engineer
2011.3-2020, (dropout) Ph.D. Candidate, School of Electrical and Electronic Engineering, Yonsei University, Republic of Korea
2008.9-2011.2, Korea Research Institute of Chemical Technology, Researcher
2006.9-2008.8, M.S., Department of materials engineering, Pai Chai University, Republic of Korea
2000.2-2006.8, B.S., Department of ceramic engineering, Pai Chai University, Republic of Korea
Work Experience
ASM Korea
1. Several SiO gap-fill process development and new penetration achieved to various customer
2. Directly contact customers in various countries to explained ASM technology and addressed their requirements
KRICT (Korea Research Institute of Chemical Technology)
1. Fabricated and investigated of gate dielectrics, channel layers and thermoelectric films via plasma-enhanced chemical vapor deposition (PECVD) and atomic layer deposition (PEALD) process
2. Many kinds of thin film deposition experience such as aluminum oxide, tin oxide, zinc oxide, metal sulfide and metal telluride.