Harry Yamashita
Director, Process Technology Department Tokyo Electron
Harry Yamashita has been a Director at Tokyo Electron Kyushu Limited (TKL) for the past 5 years with the responsibility of process development for advanced wet cleaning systems, both single wafer and batch tools. Moreover, Yamashita has been the Surface Preparation Systems (SPS) technical account manager for leading edge memory and foundry suppliers.
Yamashita received a bachelor’s degree in statistics from Keio University in Yokohama Japan in 1996 and began working for TEL as a startup engineer for CLEAN TRACK systems. Since that time he has worked in R&D development of the 300mm process for CLEAN TRACK systems, product marketing for CLEAN TRACK systems, and product marketing for Surface Preparation Systems (SPS) where he assisted in R&D for single wafer cleans and 450mm development. In 2013, Yamashita moved to TEL’s Koshi factory in Kumamoto where he became the Process Manager for SPS, and since 2014 he has been the Process Director for SPS at the TKL factory.